Humboldt-Universität zu Berlin, Institut für Physik

Photonik

Mathematisch-Naturwissenschaftliche Fakultät

Institut für Physik


Kontakt

Mitarbeiterinnen / Mitarbeiter

Forschung

Lehre

Projekte

Publikationen

Vorträge / Poster

Patente

Dissertationen

Diplomarbeiten

Stellenangebote

Bachelorangebote

Masterangebote

Öffentlichkeitsarbeit


Intern


Motivation Equipment Findings Investigators

Methods & Equipment

 

A tandem system for molecular-beam epitaxy

The MBE system (DCA Instruments) consists of two growth chambers dedicated for the deposition of inorganic and organic compounds. The growth reactors are connected via an ultra-high vacuum (UHV) line into a tandem system. The growth chamber for ZnO-based inorganic compounds (based on DCA-450 MBE) has 8 ports for the effusion cells and other sources. The chamber is currently equipped with standard solid-state sources for Zn, Mg, Ga (two effusion cells for every metal) and Cd. Active O is supplied by a radio-frequency plasma source. The chamber for organic molecules (DCA-350) has 6 ports for the molecular sources. The organic species are evaporated from low-temperature effusion cells specially designed to avoid thermal damaging of the molecules. Both chambers are equipped with reflection high energy electron diffraction (RHEED) systems and quadrupole mass-spectrometers to monitor the growth processes. The maximal substrate size is ╝ of a diameter 2ö wafer. Transferring the samples between the chambers via the UHV line enables fabrication of hybrid inorganic-organic structures without breaking out the vacuum and avoiding contamination of the interfaces. For the in-situ sample characterization the system is additionally equipped with a combined low-energy electron diffraction (MCP-LEED) and auger-electron spectroscopy (AES) analyzer, as well as a UHV scanning-tunneling and atomic-force microscope (STM/AFM) unit operating in standard topography and Kelvin modes for local mapping of the surface potential and electric states of the samples. For ex-situ optical characterization of sensitive to air samples a mobile UHV shuttle chamber is available to transfer structures between the growth apparatus and different characterization setups.

Growth chambers of the MBE tandem system: inorganic (left) and organic (right)

 

Features

 

OMICRON MCP-LEED

 

Features

 

UHV STM/AFM unit (OMICRON)

 

Features

 


letzte Änderung: 21.09.2015 id    


English


home